| Total power, kW |
180 |
| Voltage of a feeding three-phase industrial frequency grid of 50 Hz, V |
380 |
| Accelerating voltage of electron-beam guns, kV |
40 |
| Quantity and nominal capacity of electron-beam guns n x kW |
|
| – for evaporation of materials |
2×60 |
| – for heating |
1×60 |
| Level of vacuum in the working chamber, Pa |
6×10-3 |
| Maximum size of condensation surfaces, mm: |
|
| – rectangular flat |
550×360 |
| – flat round |
750 |
| – Cylindrical: |
|
| diameter |
300 |
| length |
550 |
| Spacing interval from a surface of evaporation to the surface of condensation (cylindrical axe), mm |
350 |
| Quantity of crucibles, pieces |
6 |
| Maximum size of evaporated ingots, mm: |
|
| – diameter |
70 |
| – length |
500 |
| Quantity of crucibles, pieces |
4 |
| Crucibles’ internal size, mm |
70 |
| Loading capacity of Horizontal rod, kg |
50 |
| Loading capacity of vertical rod, kg |
100 |
| Feeding speed of evaporated ingots, mm/min. |
0,15 –- 300 |
| Speed of rotation on a horizontal rod, rev/min. |
13, 20, 30 |
| Speed of rotation on a vertical rod, rev/min |
10 –- 30 |
| Consumption of cooling water, m3/hour |
16 |
| Pressure of cooling water, Pa |
3×105 –- 4×105 |
| Critical dimensions of the equipment, mm: |
|
| – length |
6900 |
| – width |
10300 |
| – altitude |
3750 |
| Area occupied by the equipment, m2 |
140 |
| Weight of the unit, tone |
20 |
